Handbook of Surface and Nanometrology

Updated and expanded, this definitive reference determines how the reduction in scale from macro to nano has affected all aspects of surface use and measurement and discusses the impact of this shift on characterization, standardization, manufacture, and performance. Written with a pervasive nanotechnological perspective, this edition covers new methods of production and measurement as well as new performance requirements in nanometronomy practice. Like its predecessor, it continues to provide in-depth, extensive coverage of the engineering, physics, materials, mathematics, and computing involved in surface metrology and nanometrology.