Mems Technology and Devices: Proceedings of the ICMAT 2007 Conference

This volume covers the current trends and developments in microelectromechanical systems (MEMS) technologies and devices, particularly applications that involve MEMS design, modeling, fabrication processes, lab-on-a-chip, biophotonic, medical devices such as DNA, protein and cell sorting, and nano devices. The contributions also explore new devices, process innovation, and engineering applications related to MEMS technology and devices.