Microfabrication and Nanomanufacturing

Honing on the increased activity in nanotechnology driven by economic necessity, this book examines the technology of fabrication and manufacturing of engineering materials at the micro- and nanoscale. The text describes the construction of microscale components using lithographic techniques, including examples of LiGA and deep X-ray lithography. It discusses bulk and micromachining procedures used for producing features, manufacturing methods such as injection molding, and the processes used to fabricate master molds for subsequent operations. Additional material introduces new concepts including the deposition of thin solid films onto the surfaces of special tools and pulsed water drop machining.