Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications (Oxford Series in Nanomanufacturing)
Utke, Ivo; Moshkalev, Stanislav; Russell, Phillip
ISBN: 9780199734214
Vydavatelství: Oxford University Press
Rok vydání: 2012
Vazba: Hardback
Počet stran: 840
Původní cena: 8 872 Kč
Výstavní cena:
7 098 Kč(t.j. po slevě 20%)
(Cena je uvedena včetně 10% DPH)
Katalogová cena: 215 GBP
Nárok na
dopravu zdarma
Termín dodání na naši pobočku v Brně je přibližně 3-4 týdny.
The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined.